P-7 Profilometer

The Tencor P-7 is a high-performance stylus profiler that provides 2D and 3D measurement capabilities with industry-leading accuracy. Its advanced features make it essential for diverse measurement applications, including medical devices, semiconductor materials, solar cells, and thin films.

Key Features

  • 4Å step height repeatability with sub-Angstrom vertical resolution.
  • 2D and 3D measurement capability.
  • Diamond stylus with 2µm radius for precision measurement.
  • 150mm motorized X-Y sample stage and scan length, eliminating the need for stitching.
  • Constant force control ranging from 0.03mg to 50mg.
  • Top or side view optics equipped with a 5MP color camera for enhanced visualization.
  • Windows 10, 64-bit platform with Microsoft Office and advanced surface analysis software (Apex 2D and 3D).

Measurement Application Examples

 

Stress Monitoring

The Tencor P-7 offers superior measurement performance with its industry-leading repeatability and fully automated capabilities. With over 40 years of surface metrology expertise, KLA Instruments provides tailored solutions supported by a global team of application experts.